Es ist eine neuere Version 2023W dieser LV im Curriculum Master's programme Medical Engineering 2024W vorhanden.
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Workload
Education level
Study areas
Responsible person
Hours per week
Coordinating university
3 ECTS
M2 - Master's programme 2. year
Mechatronics
Wolfgang Hilber
2 hpw
Johannes Kepler University Linz
Detailed information
Original study plan
Master's programme Mechatronics 2012W
Objectives
- Become acquainted with typical fabrication technologies in the microsensor-field.
- Self-employed fabrication of a thin-film device within the scope of a current research project.
Subject
Laboratory course on technology in microelectronics and microstystems technology including exercises in the cleanroom/technology Lab:
- Substrate preparation/cleaning
- PVD: physical vapor deposition (thermal and electron-gun) - Photo-lithography including spin-coating - CVD: plasma etching - Wet-chemical etching
Criteria for evaluation
Personal cooperation, report
Methods
- Theoretical introduction in the field oft thin-film technology
- Hands-on work in the technology lab
