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[ 491CTIMITFV19 ] VL Industrial Thin Film Technologies
Versionsauswahl
Workload Education level Study areas Responsible person Hours per week Coordinating university
1,5 ECTS M2 - Master's programme 2. year Chemistry Achim Walter Hassel 1 hpw Johannes Kepler University Linz
Detailed information
Original study plan Master's programme Chemistry and Chemical Technology (CCT) 2025W
Learning Outcomes
Competences
Students will access fundamental concepts related to thin film fabrication from both physical and chemical vapor phase.
Skills Knowledge
Upon completion of the course they will be able to • understand principle and concepts related to thin film nucleation and growth. (k1, k2) • discriminate between and suitably select vacuum chambers and pumps. (k2, k3) • understand principles of thermal evaporation. (k2, k3, k4) • use a laser for pulsed laser deposition. (k2, k3) • understand principles of e-beam evaporation. (k2, k3) • understand principles of sputtering. (k2, k3) • apply principles of electrochemical thin film formation. (k1, k2, k3) • understand principles of chemical vapor phase deposition. (k2, k3) The course is divided into several parts with sections of theoretical background refreshing: • crystal structure - Symmetry groups, quasicrystals, crystallography tuning, Maxwell-Boltzmann distribution • surface interactions - adsorption – desorption, surface diffusion • vacuum chambers and pumps - flange systems, types of pumps for low and high vacuum • thermal evaporation - thermal evaporation sources, design, MBE, JVD • pulsed laser deposition - design, film characteristics • energy beams and plasma - electron beam evaporation, lithography • sputtering - planar diode, DC sputtering • electrochemical films - electrodeposition, electroless deposition • chemical vapor deposition - basics of CVD - thermodynamics, Si deposition, reactions • chemical vapor deposition - types of CVD - APCVD, LPCVD, MOCVD, special CVD
Criteria for evaluation The lecture finishes with a written, 1h examination. The evaluation contains 20 multiple choice questions.
Methods PowerPoint slides and board for calculation examples.
Language English
Study material The lecture itself would provide the minimum knowledge requested. Additional information may be found in various specialty books or instrument manufacturers.
Changing subject? No
Corresponding lecture 491WMACCTFV14: VL Chemical Thin Film Technology (2.6 ECTS)
On-site course
Maximum number of participants -
Assignment procedure Direct assignment