| Detailinformationen |
| Quellcurriculum |
Masterstudium Physics 2023W |
| Ziele |
(*)The course provides practical experiences and skills in fabrication of nanostructures.
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| Lehrinhalte |
(*)Practical experiments in photolithography, reactive ion etcing and metallization. Work under clean room conditions.
|
| Beurteilungskriterien |
(*)Experimental work, results and written protocol.
|
| Lehrmethoden |
(*)Students perform fabrication and processing of nanostructures using modern equipment under clean room conditions.
|
| Abhaltungssprache |
Deutsch oder Englisch |
| Literatur |
(*)Instructions and Literature can be downloaded from KUSSS.
Script of the lecture "Nanofabrication II".
|
| Lehrinhalte wechselnd? |
Nein |
| Sonstige Informationen |
(*)The course is intended for students enrolled in the lecture Nanofabrication II, as well as master and PhD students who would like to aquire practical experience and skills in fabrication of micro- and nanostructures.
|
| Äquivalenzen |
(*)TPMPNPRNAF2: PR Nanofabrikation II (1,5 ECTS)
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| Frühere Varianten |
Decken ebenfalls die Anforderungen des Curriculums ab (von - bis)
TPMPNPRN2HT: PR Nanofabrikation II: Halbleitertechnologie (2012S-2023S)
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