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| Detailed information |
| Original study plan |
Master's programme Mechatronics 2021W |
| Objectives |
Understanding the technologies and methods used for the realization of microsensors. The level of the presentation is similar to Gerlach, Einführung in die Mikrosystemtechnik, Hanser Verlag, 2006.
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| Subject |
Introduction, Scaling, Micro Acoustics, Acceleration Pick-up, Micro Fluidics, Microelectronics Technology, Microsystems Technology, Semiconductor Sensors
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| Criteria for evaluation |
Written exam
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| Methods |
Lecture with examples and problems
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| Language |
German or English |
| Study material |
Lecture notes
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| Changing subject? |
No |
| Further information |
none
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| Corresponding lecture |
(*)MEMWEVOMISK: VO Mikrosensorik (3 ECTS)
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