Inhalt

[ MEMWEPRMEMS ] PR Microelectronics and Microsystems Technology Lab

Versionsauswahl
(*) Unfortunately this information is not available in english.
Workload Education level Study areas Responsible person Hours per week Coordinating university
3 ECTS M2 - Master's programme 2. year Mechatronics Wolfgang Hilber 2 hpw Johannes Kepler University Linz
Detailed information
Original study plan Master's programme Mechatronics 2012W
Objectives - Become acquainted with typical fabrication technologies in the microsensor-field. - Self-employed fabrication of a thin-film device within the scope of a current research project.
Subject Laboratory course on technology in microelectronics and microstystems technology including exercises in the cleanroom/technology Lab: - Substrate preparation/cleaning - PVD: physical vapor deposition (thermal and electron-gun)
- Photo-lithography including spin-coating
- CVD: plasma etching
- Wet-chemical etching
Criteria for evaluation Personal cooperation, report
Methods - Theoretical introduction in the field oft thin-film technology - Hands-on work in the technology lab
Language German or English
Changing subject? No
Further information Prior knowledge is not required.
Corresponding lecture (*)ME3WPPRPMIK: PR Praktikum Mikroelektronik (4 ECTS)
On-site course
Maximum number of participants 20
Assignment procedure Assignment according to sequence