- Identification of sensor mechanisms of existing systems (k4, k5)
- Identification of suitable sensor mechanisms of systems to be designed (k4-k6)
- Design of models for sensors and sensor mechanisms (k6)
- Analysis and calculation of microsensors (k4, k5)
|
Introduction, Scaling, Micro Acoustics, Acceleration Pick-up, Micro Fluidics, Microelectronics Technology, Microsystems Technology, Semiconductor Sensors
|