| Detailed information |
| Original study plan |
Master's programme Mechatronics 2025W |
| Learning Outcomes |
Competences |
- Become acquainted with typical fabrication technologies - thin film technology as well as aditive technologies - in the microsensor-field.
- Self-employed fabrication of technology samples within the scope of a current research project at the institute.
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| Skills |
Knowledge |
- Working in a technology laboratory ( cleanroom. (k1 - k3)
- Handling of technological materials and chemicals. (k1 - k3)
- Handling of technological equipment (e.g. plasma coater/etcher, spin coater, laser cutter, surface profiler, etc). (k1 - k3)
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- (Functional) materials used in the microsensor field.
- Technological processes for fabrication (thin film technology as well as additive technologies).
- Application fields of microsensors.
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| Criteria for evaluation |
Personal cooperation, technical report, fabricated samples
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| Methods |
- Theoretical introduction in the field of microsensor technology.
- Hands-on work in the technology lab / cleanroom.
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| Language |
German or English |
| Study material |
lecture slides
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| Changing subject? |
No |
| Further information |
Prior knowledge is not required.
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| Corresponding lecture |
(*)ME3WPPRPMIK: PR Praktikum Mikroelektronik (4 ECTS)
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| Earlier variants |
They also cover the requirements of the curriculum (from - to)
MEMWEPRMEMS: PR Microelectronics and Microsystems Technology Lab (2009W-2022S)
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