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[ 461NAESNACP23 ] PR Nano Characterization
Versionsauswahl
Workload Education level Study areas Responsible person Hours per week Coordinating university
1,5 ECTS M1 - Master's programme 1. year Physics Gunther Springholz 1 hpw Johannes Kepler University Linz
Detailed information
Original study plan Master's programme Physics 2025W
Learning Outcomes
Competences
Upon successful completion of the course, students are able to apply experimental methods and instrumentation for the characterization and investigation of nanostructures. They can perform and optimize microscopy investigations of nanostructures, analyze the results and critically evaluate their findings.

This lab course is methodologically complemented by the lecture Nanocharacterization.

Skills Knowledge
Upon completing the course, students will possess the following skills. They are able to

  • understand, design and carry out process sequences for semiconductor wafer patterning (k2/k3);
  • perform lithography, thin film deposition and pattern transfer (k3);
  • characterize and critically evaluate the results using various microscopy techniques (k3-k5);
  • analyze and model the data using software tools (k4);
  • summarize the results in a laboratory report (k4/k5).
During the course, students will acquire practical knowledge in the following areas and concepts of nanocharacterization techniques:

  • scanning probe microscopy (AFM, MFM);
  • X-ray diffraction;
  • electron microscopy;
  • microphotoluminescence at cryogenic temperatures.
Criteria for evaluation experimental work, results and written protocol
Methods practical experiments and solution of given problems, using advanced experimental set-ups such as SEM, AFM and photoluminescence
Language English
Study material instructions and literature can be downloaded from KUSSS; script of the lecture Nanocharacterization
Changing subject? No
Further information The course is intended for students enrolled in the lecture Nanocharacterization, as well as Master and PhD students who would like to acquire practical experience and skills for investigating micro- and nanostructures.
Earlier variants They also cover the requirements of the curriculum (from - to)
TPMPNPRNAC1: PR Nanocharacterisation I (2009W-2023S)
On-site course
Maximum number of participants 15
Assignment procedure Assignment according to priority