| Detailed information |
| Original study plan |
Master's programme Physics 2023W |
| Objectives |
The course provides practical experiences and skills in fabrication of nanostructures.
|
| Subject |
Practical experiments in photolithography, reactive ion etcing and metallization. Work under clean room conditions.
|
| Criteria for evaluation |
Experimental work, results and written protocol.
|
| Methods |
Students perform fabrication and processing of nanostructures using modern equipment under clean room conditions.
|
| Language |
German or English |
| Study material |
Instructions and Literature can be downloaded from KUSSS.
Script of the lecture "Nanofabrication II".
|
| Changing subject? |
No |
| Further information |
The course is intended for students enrolled in the lecture Nanofabrication II, as well as master and PhD students who would like to aquire practical experience and skills in fabrication of micro- and nanostructures.
|
| Corresponding lecture |
TPMPNPRNAF2: PR Nanofabrikation II (1,5 ECTS)
|
| Earlier variants |
They also cover the requirements of the curriculum (from - to)
TPMPNPRN2HT: PR Nanofabrication II: Semiconductor Technology (2012S-2023S)
|
