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Detailed information |
Original study plan |
Master's programme Mechatronics 2021W |
Objectives |
Understanding the technologies and methods used for the realization of microsensors. The level of the presentation is similar to Gerlach, Einführung in die Mikrosystemtechnik, Hanser Verlag, 2006.
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Subject |
Introduction, Scaling, Micro Acoustics, Acceleration Pick-up, Micro Fluidics, Microelectronics Technology, Microsystems Technology, Semiconductor Sensors
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Criteria for evaluation |
Written exam
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Methods |
Lecture with examples and problems
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Language |
German or English |
Study material |
Lecture notes
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Changing subject? |
No |
Further information |
none
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Corresponding lecture |
(*)MEMWEVOMISK: VO Mikrosensorik (3 ECTS)
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