| Detailed information |
| Original study plan |
Master's programme Mechatronics 2023W |
| Objectives |
- Become acquainted with typical fabrication technologies in the microsensor-field.
- Self-employed fabrication of a thin-film device within the scope of a current research project.
|
| Subject |
Laboratory course on technology in microelectronics and microstystems technology including exercises in the cleanroom/technology Lab:
- Substrate preparation/cleaning
- PVD: physical vapor deposition (thermal and electron-gun)
- Photo-lithography including spin-coating
- CVD: plasma etching
- Wet-chemical etching
|
| Criteria for evaluation |
Personal cooperation, report
|
| Methods |
- Theoretical introduction in the field oft thin-film technology
- Hands-on work in the technology lab
|
| Language |
German or English |
| Changing subject? |
No |
| Further information |
Prior knowledge is not required.
|
| Corresponding lecture |
(*)ME3WPPRPMIK: PR Praktikum Mikroelektronik (4 ECTS)
|
| Earlier variants |
They also cover the requirements of the curriculum (from - to)
MEMWEPRMEMS: PR Microelectronics and Microsystems Technology Lab (2009W-2022S)
|
