[ 461QAESLTMV23 ] VL Laser Technology for Micro- and Nanostructuring

Workload Education level Study areas Responsible person Hours per week Coordinating university
3 ECTS M2 - Master's programme 2. year Physics Johannes Heitz 2 hpw Johannes Kepler University Linz
Detailed information
Original study plan Master's programme Physics 2023W
Subject Introduction to Patterning by means of Lasers, Photo Lithography with Pulsed UV Lasers, EUV Lithography, Laser-interference Techniques, Laser Ablation for Micro-patterning, Self-organized Micro- and Nano-structures, Near-field Techniques for Laser-patterning, Stereo Lithography, Formation of Sub-wavelength Structures by Non-linear Processes, Interaction of Biological Cells with Laser-induced Micro- and Nano-structures.
Criteria for evaluation
Language German (in case English)
Changing subject? No
Earlier variants They also cover the requirements of the curriculum (from - to)
TPMWNVOLAMN: VO Laser techniques for micro- and nanostructuring (2010W-2023S)
On-site course
Maximum number of participants -
Assignment procedure Direct assignment