[ 481VMRSMISK22 ] KV Microsensors

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Workload Education level Study areas Responsible person Hours per week Coordinating university
3 ECTS M2 - Master's programme 2. year Mechatronics Bernhard Jakoby 2 hpw Johannes Kepler University Linz
Detailed information
Original study plan Master's programme Mechatronics 2021W
Objectives Understanding the technologies and methods used for the realization of microsensors. The level of the presentation is similar to Gerlach, Einf├╝hrung in die Mikrosystemtechnik, Hanser Verlag, 2006.
Subject Introduction, Scaling, Micro Acoustics, Acceleration Pick-up, Micro Fluidics, Microelectronics Technology, Microsystems Technology, Semiconductor Sensors
Criteria for evaluation Written exam
Methods Lecture with examples and problems
Language German or English
Study material Lecture notes
Changing subject? No
Further information none
Corresponding lecture (*)MEMWEVOMISK: VO Mikrosensorik (3 ECTS)
On-site course
Maximum number of participants -
Assignment procedure Assignment according to sequence