[ TPMPNPRN2HT ] PR Nanofabrication II: Semiconductor Technology

(*) Unfortunately this information is not available in english.
Workload Education level Study areas Responsible person Hours per week Coordinating university
1,5 ECTS M1 - Master's programme 1. year Physics Gunther Springholz 1 hpw Johannes Kepler University Linz
Detailed information
Original study plan Master's programme Nanoscience and Technology 2012W
Objectives The course provides practical experiences and skills in fabrication of nanostructures.
Subject Practical experiments in photolithography, reactive ion etcing and metallization. Work under clean room conditions.
Criteria for evaluation Experimental work, results and written protocol.
Methods Students perform fabrication and processing of nanostructures using modern equipment under clean room conditions.
Language German or English
Study material Instructions and Literature can be downloaded from KUSSS. Script of the lecture "Nanofabrication II".
Changing subject? No
Further information The course is intended for students enrolled in the lecture Nanofabrication II, as well as master and PhD students who would like to aquire practical experience and skills in fabrication of micro- and nanostructures.
Corresponding lecture (*)TPMPNPRNAF2: PR Nanofabrikation II (1,5 ECTS)
On-site course
Maximum number of participants 15
Assignment procedure Assignment according to priority